C.-W. Sohn, C. Y. Kang, R.-H. Baek, P. Kirsh, R. Jammy, M.-D Ko, D.-Y. Choi, H. C. Sagong, E.-Y. Jeong, C.-K. Baek, J.-S. Lee,

C.-W. Sohn, C. Y. Kang, R.-H. Baek, P. Kirsh, R. Jammy, M.-D Ko, D.-Y. Choi, H. C. Sagong, E.-Y. Jeong, C.-K. Baek, J.-S. Lee, Y.-H. Jeong, J. C. Lee, “Modeling and Analysis of the Parasitic Series 15-3 Resistance in Raised Source/Drain FinFETs with Polygonal Shaped Epitaxy” 2012 IEEE 17th International Conference on Simulation of Semiconductor Processes and Devices, Denver, Colorado, Sep. 2012.

http://in4.iue.tuwien.ac.at/pdfs/sispad2012/15-3.pdf